Use to separate 300mm wafers.
• Contacts wafer face in exclusion zone only
• Reduced contact to wafer back-side
• Works with non-standard wafer thicknesses
• ESD protection for static sensitive wafers
• Use with eWB0026 canister
ePAK eM-01 is conductive polypropylene.
Key Properties:
• Black (carbon powder filled)
• Provides permanent ESD protection
• Static dissipative (10^4-10^5 ohms/sq)
• Not hygroscopic (water absorption <0.01%)
• Specific gravity: 0.97 g/cm^3
• Continuous use temperature limit: 55°C
• Chemical resistance: IPA OK, Acetone OK
950 Vapor Trail, Suite 120
Colorado Springs, CO 80916
+1 (719) 445-8822
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